InfiniteFocus – Optical 3D surface measurement of roughness and shape

Users benefit from a 3D micro coordinate measurement machine and surface roughness measurement device combined in one system. Users achieve traceable measurement results in a high repeatability and a vertical resolution of up to 10nm. The robust measurement principle of Focus Variation in combination with a vibration-isolating hardware enables the form and roughness measurement of also large and heavy components. All axes of InfiniteFocus are equipped with highly accurate encoders ensuring precise stage movement. With an automation interface, InfiniteFocus is also applied for fully automatic measurement in production.

Technical Specifications

Measurement principle non-contact, optical, three-dimensional, based on Focus-Variation
Positioning volume (X x Y x Z) 100 mm x 100 mm x 100 mm = 1000000 mm3 (optional: 200 mm x 200 mm x 100 mm = 4000000 mm³)
Objective magnification 2.5x 5x 10x HX 10x 20x HX 20x 50x 100x
Working distance mm 8.8 23.5 37 17.5 30 19 11 4.5
Lateral measurement range (X,Y)
(X x Y)
mm
mm²
5.63
31.7
2.82
7.85
1.62
2.62
1.62
2.62
0.7
0.49
0.81
0.66
0.32
0.10
0.16
0.03
Vertical resolution nm 2300 410 250 100 80 50 20 10
Height step accuracy (1 mm) % n.a. 0.05 0.05 0.05 0.05 0.05 0.05 0.05
Max. measurable area Optional mm²
mm²
10000
40000
10000
40000
10000
40000
10000
40000
10000
24780
10000
24780
3965
3965
990
990
Min. measurable roughness (Ra) µm 7 1.2 0.75 0.3 0.24 0.15 0.06 0.03
Min. measurable roughness (Sa) µm 3.5 0.6 0.375 0.15 0.12 0.075 0.03 0.015
Min. measurable radius µm 20 10 5 5 3 3 2 1