InfiniteFocus – Optical 3D surface measurement of roughness and shape
Users benefit from a 3D micro coordinate measurement machine and surface roughness measurement device combined in one system. Users achieve traceable measurement results in a high repeatability and a vertical resolution of up to 10nm. The robust measurement principle of Focus Variation in combination with a vibration-isolating hardware enables the form and roughness measurement of also large and heavy components. All axes of InfiniteFocus are equipped with highly accurate encoders ensuring precise stage movement. With an automation interface, InfiniteFocus is also applied for fully automatic measurement in production.
Technical Specifications
| Measurement principle | non-contact, optical, three-dimensional, based on Focus-Variation |
| Positioning volume (X x Y x Z) | 100 mm x 100 mm x 100 mm = 1000000 mm3 (optional: 200 mm x 200 mm x 100 mm = 4000000 mm³) |
| Objective magnification | 2.5x | 5x | 10x HX | 10x | 20x HX | 20x | 50x | 100x | |
| Working distance | mm | 8.8 | 23.5 | 37 | 17.5 | 30 | 19 | 11 | 4.5 |
| Lateral measurement range (X,Y) (X x Y) |
mm mm² |
5.63 31.7 |
2.82 7.85 |
1.62 2.62 |
1.62 2.62 |
0.7 0.49 |
0.81 0.66 |
0.32 0.10 |
0.16 0.03 |
| Vertical resolution | nm | 2300 | 410 | 250 | 100 | 80 | 50 | 20 | 10 |
| Height step accuracy (1 mm) | % | n.a. | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
| Max. measurable area Optional | mm² mm² |
10000 40000 |
10000 40000 |
10000 40000 |
10000 40000 |
10000 24780 |
10000 24780 |
3965 3965 |
990 990 |
| Min. measurable roughness (Ra) | µm | 7 | 1.2 | 0.75 | 0.3 | 0.24 | 0.15 | 0.06 | 0.03 |
| Min. measurable roughness (Sa) | µm | 3.5 | 0.6 | 0.375 | 0.15 | 0.12 | 0.075 | 0.03 | 0.015 |
| Min. measurable radius | µm | 20 | 10 | 5 | 5 | 3 | 3 | 2 | 1 |
