InfiniteFocusSL – As fast and intuitive as 3D surface measurement can be
InfiniteFocusSL is a cost efficient optical 3D measurement system for easy, fast and traceable measurement of form and finish on micro structured surfaces. Users measure both form and roughness of components with only one system. In addition, color images with high contrast and depth of focus are achieved. The long working distance of up to 33mm in combination with its measurement field of 50mm x 50mm allows a wide range of applications. Measurements are achieved in seconds and features, such as a coaxial laser for quick and easy focusing, further increase usability. With an automation interface, InfiniteFocusSL is also applied for fully automatic measurement in production.
Technical Specifications
| Measurement principle | non-contact, optical, three-dimensional, based at Focus-Variation |
| Positioning volume (X x Y x Z) | RL objectives: mot.: 50 mm x 50 mm x 155 mm (Z: 25 mm mot., 130 mm man.) = 387500 mm³ SXRL/AXRL objectives: mot.: 50 mm x 50 mm x 120 mm (Z: 25 mm mot., 95 mm man.) = 300000 mm³ |
| Objective magnification | 10x | 20x | 50x | 2xSX | 5xAX | 10xAX | 20xAX | 50xSX | |
| Working distance | mm | 17.5 | 16 | 10.1 | 34 | 34 | 33.5 | 20 | 13 |
| Lateral measurement area (X,Y) (X x Y) |
mm mm² |
2 4 |
1 1 |
0.4 0.16 |
10 100 |
3.61 13.03 |
2 4 |
1 1 |
0.4 0.16 |
| Vertical resolution | nm | 100 | 50 | 20 | 3500 | 460 | 130 | 70 | 45 |
| Height step accuracy (1 mm) | % | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 | 0.1 |
| Max. measurable area | mm² | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 | 2500 |
| Min. measurable roughness (Ra) | µm | 0.3 | 0.15 | 0.08 | n.a. | n.a. | 0.45 | 0.25 | 0.15 |
| Min. measurable roughness (Sa) | µm | 0.15 | 0.075 | 0.05 | n.a. | n.a. | 0.25 | 0.1 | 0.08 |
| Min. measurable radius | µm | 5 | 3 | 2 | 20 | 10 | 5 | 3 | 2 |
