The Inspection System for Microelectronics and Semiconductor – DM3 XL

Fast detection, fast action

Speed matters in inspection, process control, or defect and failure analysis for the microelectronics and semiconductor industry. The faster you detect a defect, the faster you can react.

30% more field of view

With a large field of view, the DM3 XL inspection system allows your team to identify defects faster and increase your yield rate. Make use of the 30% increased field of view of the unique macro objective.

See more, work faster

Seeing more means working faster. To rapidly scan large components up to 6’’, the DM3 XL provides a unique macro objective.

With a magnification of 0.7x it captures a field of view of 35.7 mm at once – 30% more than with other conventional scanning objectives.

With the macro objective, defects don’t stand a chance:

Increase your yield

Reliably detect insufficient development at the edge or within the center of a wafer

Detect uneven radial film thickness

LED for all contrast methods

The DM3 XL uses LED illumination for all contrast methods. LED illumination provides a constant color temperature and offers real color imaging at all intensity levels.

True-to-life color imaging at all intensity levels
Adjustment-free
No bulb exchange – no down-time
Reproducible results

With a long lifetime and low power consumption, LEDs also have an enormous cost savings potential.

Optical high performer

With the DM3 XL, you can benefit from optical excellence at an affordable price.

Examine sides, edges or chippings with oblique illumination: illuminate your sample from different angles as an easy and effective way to visualize topographies.
Detect micro scratches or small particles in lower layers of the sample with in-depth darkfield contrast.

You’ll be stunned by the dramatically increased sensitivity and resolution.

Documentation simplified

For efficient and high-quality documentation of your results, Leica offers a broad range of microscope cameras. All of our inspection cameras stand out for their fast live images, short reaction times, high resolution and clear contrast. Depending on your application needs, you can choose between an image resolution from 1.3 to 8 megapixels, exposure time of 100 μsec to 30 seconds and color depth of up to 16 bits per color channel. Leica microscope cameras come with a standard interface like Firewire-B, USB 2.0 or USB 3.0 to be connected to a PC with a single interface cable.

The Inspection System for Microelectronics and Semiconductor – DM3 XL

Fast detection, fast action

See more, work faster

LED for all contrast methods

Optical high performer

Variety of samples – variable stage inserts

Documentation simplified

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